PMNL-T Series - Micro-step Motor Yaw Displacement Table

  • 格物光学15-PMNL-T系列-微步电机偏摆位移台-1.png


    Goptica PMNL-T Series - Microstep Motor Swing Displacement Stage

    Micro step driving principle achieves nanometer level precision and high driving force

           Ceramic micro stepper motor is a new type of biomimetic piezoelectric actuator, which is driven by multiple sets of multidimensional piezoelectric actuator units according to a step-by-step action logic to achieve linear driving of the motor rotor. Its main characteristics are small size and strong driving force; It can maintain high support force in static state and has no thermal power consumption; It can achieve high subdivision in a single step and achieve nanometer level high resolution; The step-by-step motion mode can achieve a large motion stroke of mm level.

    Optional incremental grating ruler for high-precision positioning

           The non-contact grating ruler can directly detect the displacement of the moving table, minimizing the position error caused by indirect displacement detection.


    Suitable for complex vacuum environment applications

           Ceramic micro stepper motor can be optionally equipped with a vacuum version. The motor has no thermal power consumption and does not generate a magnetic field under static conditions.


    Product manual: 格物PDF.png


    Features:Application:

    Using piezoelectric micro stepper motor as the motion actuator, with high driving force and high holding force

    - Multi axis parallel control

    - Mm large travel range

    - Integrated high-precision grating ruler with nanometer resolution





    Structural leveling and elevation adjustment

    - Precision semiconductor equipment

    - Space Science

    - Non-magnetic environment

    - Vacuum non heating environment

    - Precision medical testing equipment


    Mechanical dimension diagram:
    格物光学15-PMNL-T系列-微步电机偏摆位移台-2.png格物光学13-PMIN-C24系列-惯性电机-2.png格物光学15-PMNL-T系列-微步电机偏摆位移台-3.png
    Dimensions, unit: mm




  • Specifications and Parameters


    PMNLT23-ZT20A

    Unit

    Tolerance

    运动轴/Active Axes

    Z



    运动性能/Positioning

    Z轴运动行程/Travel range in Z

    ±10

    mm


    rX轴运动行程/Travel range in rX

    ±1.1



    rY轴运动行程/Travel range in rY

    ±1



    传感器/Sensor

    Linear grating ruler



    开环分辨率/Open loop resolution

    1

    nm


    传感器分辨率/Sensor resolution

    5

    nm


    传感器信号/Sensor Signalrt

    AqB



    Z轴单向重复性/Unidirectional

    repeatability in Z

    ±50

    nm

    Typical values

    rX轴单向重复性/Unidirectional

    repeatability in rX

    ±1.2

    μrad

    Typical values

    rY轴单向重复性/Unidirectional

    repeatability in rY

    ±1

    μrad

    Typical values

    z轴双向重复性/Bidirectional

    repeatability in Z

    ±100

    nm

    Typical values

    rX轴双向重复性/Bidirectional

    repeatability in rX

    ±2.4

    μrad

    Typical values

    rY轴双向重复性/Bidirectional

    repeatability in rY

    ±2

    μrad

    Typical values

    速度/Nelocity

    1.0

    mm/s

    Maximum value

    机械特性/Mechanical Properties

    垂向驱动力/Vertical driver force

    200

    N

    Typical values

    垂向自锁力/Nertical holding force

    300

    N

    Minimum value

    驱动特性/Drive properties




    电机类型/Motor type

    Ceramic Microstep Motor



    工作电压/Operating voltage

    -250~250V

    V


    其他/Miscellaneous

    工作温度范围/operating

    temperature range

    0~50


    材料/Material

    Aluminum alloy/stainless steel



    电缆长度/Cable length

    1.5

    m

    ±0.02m

    电机接口/Motor interface

    D-Sub25 male head



    传感器接口/Sensor interface

    HD-Sub44 male head



    外形尺寸/Dimensions

    Length

    240

    mm


    Width

    240

    mm


    Height

    70~96

    mm


    *The actual movement speed depends on the power of the drive control circuit;

    All specification parameters are based on room temperature (22 ± 3 ℃) environment

    Precautions for use:

    1. The motor platform must be used in a clean indoor environment;

    2. It is necessary to use the drive controller provided by Yinguan Company in conjunction with it

    We can provide a vacuum version that meets the requirements of a 10-5Pa vacuum environment.



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