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The MZT90 series magnetic levitation integrated ZT platform of Gewu Optics adopts an innovative dual axis coupling design concept, with a very compact and flat contour size, which can achieve high-precision and high stiffness motion of 2 degrees of freedom in the vertical axis and rotation axis. The rotating shaft can rotate without restriction, and a unique large stroke maglev gravity compensation technology is used vertically to reduce the load on the vertical motor, greatly improving the vertical motion performance and service life. The maglev integrated ZT platform can also be integrated onto the XY platform of Gewu Optics to achieve modular assembly.
Product manual：  |
- High precision unrestricted rotational motion - Dual axis high rigidity precision guidance design - Unique large stroke maglev gravity compensation technology - High quality Z-axis jitter, motion, and stability performance - Fully closed-loop servo design - Vertical maximum support for 30mm mechanical stroke - The maximum supported speed is 150rpm - Supports wafer adsorption of various specifications such as 12 ', 8', and 6 '
| - Application of wafer process control, such as optical critical dimension inspection and thin film metrology - Laser heat treatment of wafers - Wafer marking, cleaning, and cutting - Post lithography stage
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