Stacked Three-axis Precision Displacement Table
| The LST190-365 series stacked three-axis precision displacement table of Gewu Optics adopts modular, ultra-thin design, orthogonal design and other concepts. The RD-180 standard module is integrated on the cross platform L2S125 module, which can achieve high-precision and high stiffness linear motion in the X, Y and T axes with 3 degrees of freedom. Among them, RD-180 adopts a flat design concept, which can achieve high-precision and high stiffness unrestricted rotation in the T direction. The L2S125 module of the cross platform adopts an integrated and orthogonal design concept, with a compact and flat contour size, which can achieve high-precision and high stiffness linear motion with 2 degrees of freedom in the horizontal X/Y axis. It can be widely used in wafer production control applications, such as thin film measurement, critical dimension inspection, as well as wafer marking and wafer laser annealing.
Product manual： 
|
| Features： | Mechanical dimension diagram： |
- Stacked 3-axis platform, orthogonal design - Global flatness and straightness reach micrometer level - X/Y axis High stiffness and high-precision guide rail design Consistency design of cable disturbance force - T-axis Unrestricted angular movement, optional rotation angle hard limit Chuck vacuum interface, supports multiple gas supply paths
|  
|
Customized information
Stackable three-axis precision displacement table optional: In the LST190-365 product series, optional options are configured that can be selected according to the user's actual application. The optional content includes options such as encoder, Chuck gas supply channels, control system, etc. The X-axis base can be changed to a marble base according to customer needs, which can provide higher positioning accuracy.
Table 1 Encoder Options |
| -S1 | Standard model, Renishaw encoder |
| -S2 | high-end model, Heidenhain encoder |
Table 2 Chuck gas supply options |
| -C1 | Chuck single gas supply |
| -C2 | Chuck dual gas supply |
| -C3 | Chuck three-way gas supply |
|
Product Picture |
Product Model |
Drawings And Specifications |
Operation |