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The Lattice Optics L4PDO-350 series - Stacked Four Axis Precision Displacement Platform adopts modular, ultra-thin design, orthogonal design and other concepts. The MZT90 standard module is integrated on the cross platform L2S125 module, which can achieve high-precision and high stiffness linear motion of X, Y, Z and T axes with 4 degrees of freedom. The MZT90 adopts an innovative dual axis coupling design concept, with a compact and flat profile size, which can achieve high-precision and high stiffness unrestricted rotation of Z/T axis with 2 degrees of freedom. The L2S125 module of the cross platform adopts an integrated and orthogonal design concept, with a compact and flat contour size, which can achieve high-precision and high stiffness linear motion with 2 degrees of freedom in the horizontal X/Y axis. It can be widely used in wafer production control applications, such as thin film measurement, critical dimension inspection, as well as wafer marking and wafer laser annealing.
Product manual： 
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- Stacked 4-axis platform, orthogonal design - Global flatness and straightness reach micrometer level - X/Y axis High stiffness and high-precision guide rail design Consistency design of cable disturbance force - Z-axis Vertical magnetic levitation gravity compensation can achieve high positioning accuracy High rigidity, high-precision guiding design Vertical incremental grating, capable of achieving a maximum resolution of 5 nanometers Ultra thin and lightweight design Vertical maximum support for 30mm mechanical stroke
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- T-axis
360 degree rotation, no pipeline winding, supports vacuum adsorption of 12 'and 8' wafers Supports up to 0.7mm warped wafers Maximum support speed 150rpm
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