Compound Multi-axis Precision Displacement Table

  • 格物光学-复合式多轴精密位移台.png

    The HS1000-00 series composite multi axis precision displacement table from Goptica  is a two-dimensional mechanical guide rail+air bearing composite motion platform that allows customers to effectively enjoy the advantages of both mechanical guide rails and air bearing guide rails. The high rigidity of mechanical guides in the XY plane can withstand large accelerations and provide high bidirectional repeatability, while air bearings ensure excellent dynamic flatness throughout the entire stroke. This platform adopts design concepts such as modularity and orthogonality, including MZT modules for grid objects and composite XY table modules. The MZT module is integrated on top of the composite XY table module, which can achieve high-precision, high stiffness linear and rotational motion of the X, Y, Z, and T axes with 4 degrees of freedom. The vertical direction of the MZT module adopts a unique large stroke maglev gravity compensation technology, which reduces the load on the vertical motor and greatly improves the vertical motion performance and service life. The composite XY stage module adopts drive center of mass matching, flexible gantry, and lightweight design technology, which has the ability to reduce the off center impact on high-precision mechanical guide rails, improve the reliability and lifespan of the motion system, and has the function of correcting the bias of slight translation Y1 and Y2 motors. This platform can also be integrated onto the active vibration reduction system module of Gewu to further improve system performance.


    Product manual: 格物PDF.png



    Characteristic

    - Integrated 5-axis platform, orthogonal design

    - Flatness and straightness reach micrometer level 

    - Composite application of mechanical guide rail and air floating guide rail

    - X/Y axis

       High stiffness and high-precision guide rail design     

       Consistency design of cable disturbance force  

       High performance air floating guide rail ensures excellent dynamic flatness throughout the entire stroke


    Z-axis    

       Vertical magnetic levitation gravity compensation can achieve high positioning accuracy     

       High rigidity, high-precision guiding design     

       Ultra thin, lightweight design, modular design     

       Vertical maximum support for 30mm mechanical stroke 

    - T-axis     

       360 ° rotation without pipeline winding     

       Supports wafer adsorption of various specifications such as 12 ', 8', and 6 '     

       Maximum support speed 150rpm



    Mechanical dimension diagram:

    格物光学-复合式多轴精密位移台尺寸1.png格物光学-复合式多轴精密位移台尺寸2.png



  • Specifications and Parameters


    HS1000-00
    轴/Axes NameXY1/Y2Z
    行程/Travel320 mm550 mm10 mm360°, Infinite
    最大速度/MaximumSpeed 1.2 m/s1.2 m/s0.1 m/s900°/s
    加速度/Maximum Acceleration    12 m/s^212 m/s^22 m/s^26280°/s^2
    定位精度/Position accuracy full stroke 校准前 indicative value±10 μm±10 μmNA±30 arcsec
    校准后calibration±1 μm±1 μm±0.6 μm±3 arcsec
    双向可重复性/Bidirectional Repeatability ±0.4 μm±0.4 μm

    ±0.3 μm/2 mm

    ±1 μm over rang

    ±2 arcsec
    位置稳定性/position stability (3σ)* ±25 nm*±25 nm*±15 nm*±0.2 arcsec
    直线度/straightness    ±2 μm over rang±1.5 μm over rang2 μmNA
    平面度/XY Flatness (P-P) NANANANA
    轴向跳动/Axial Error MotionNANANA±1.5 μm
    径向跳动/Radial Error MotionNANANA±1.5 μm
    机械特征/Mechanical Specifications
    驱动负载(无负载)/Moving Mass (without payload)15 Kg30 Kg5.5 KgNA
    最大负载/Max Load Capacity 2Kg(customizable)
    平台质量/Stage Mass666 Kg
    外观尺寸/Dimension 928mmX1001.6mmX383.2mm(Chuck adsorption surface to marble 155.2mm)

     *Use an 8umpitch grating ruler to test the data.



  • Customized information

    Composite multi axis precision displacement table optional: In the HS1000-00 product series, optional options are configured that can be selected according to the user's actual application. The optional content includes active shock absorbers, encoders, control systems, and other options.

    Table 1 Encoder Options

    -S1

    Incremental analog optical linear encoder,1Vpp

    -S2incremental digital optical linear encoder,TTL20μmPitch
    -S3absolute optical linear encoder, BISS high-end model20μmPitch



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