| The HS1000-00 series composite multi axis precision displacement table from Goptica is a two-dimensional mechanical guide rail+air bearing composite motion platform that allows customers to effectively enjoy the advantages of both mechanical guide rails and air bearing guide rails. The high rigidity of mechanical guides in the XY plane can withstand large accelerations and provide high bidirectional repeatability, while air bearings ensure excellent dynamic flatness throughout the entire stroke. This platform adopts design concepts such as modularity and orthogonality, including MZT modules for grid objects and composite XY table modules. The MZT module is integrated on top of the composite XY table module, which can achieve high-precision, high stiffness linear and rotational motion of the X, Y, Z, and T axes with 4 degrees of freedom. The vertical direction of the MZT module adopts a unique large stroke maglev gravity compensation technology, which reduces the load on the vertical motor and greatly improves the vertical motion performance and service life. The composite XY stage module adopts drive center of mass matching, flexible gantry, and lightweight design technology, which has the ability to reduce the off center impact on high-precision mechanical guide rails, improve the reliability and lifespan of the motion system, and has the function of correcting the bias of slight translation Y1 and Y2 motors. This platform can also be integrated onto the active vibration reduction system module of Gewu to further improve system performance.
Product manual:
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- Integrated 5-axis platform, orthogonal design - Flatness and straightness reach micrometer level - Composite application of mechanical guide rail and air floating guide rail - X/Y axis High stiffness and high-precision guide rail design Consistency design of cable disturbance force High performance air floating guide rail ensures excellent dynamic flatness throughout the entire stroke
| - Z-axis Vertical magnetic levitation gravity compensation can achieve high positioning accuracy High rigidity, high-precision guiding design Ultra thin, lightweight design, modular design Vertical maximum support for 30mm mechanical stroke - T-axis 360 ° rotation without pipeline winding Supports wafer adsorption of various specifications such as 12 ', 8', and 6 ' Maximum support speed 150rpm
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