High Vacuum Precision Two-dimensional Displacement Table
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The VLS200 series high vacuum precision two-dimensional displacement table of Gewu Optics adopts materials that meet ultra-high vacuum standards and special processes manufactured in the 1S06 clean room, ensuring suitability for ultra-high vacuum environments of 105Pa and below. While achieving high-precision and high stiffness XY motion, it also ensures thermal management and magnetic shielding requirements in a vacuum environment, and can be widely used in electron beam inspection, electron beam lithography, scanning electron microscopy, and other scenarios.
Product manual：  |
| Features： | Mechanical dimension diagram： |
- Suitable for ultra-high vacuum environments of 10 ⁵ Pa and below - Low gas release rate, low heat generation vacuum linear motor drive - Unique magnetic shielding design for linear motors - The platform material can be non-magnetic, and the overall magnetic leakage can reach nT level - Excellent speed fluctuation and position stability
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Customized information
High vacuum precision two-dimensional displacement table optional: In the vacuum product series, optional options are configured that can be selected according to the user's actual application. The optional content includes options such as travel, encoder, control system, etc. The itinerary can be customized according to the actual needs of the customer.
Table 1 Guide rail options |
| -G1 | Conventional vacuum guide rail |
| -G2 | non-magnetic vacuum guide rail |
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Product Picture |
Product Model |
Drawings And Specifications |
Operation |