Vacuum Suction Cup

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    The high-performance vacuum suction cup series of Gewu Optical Semiconductor is mainly used in semiconductor lithography and various quantity detection equipment, such as film thickness measurement, OCD measurement, morphology measurement, defect detection, etc. The suction cup adopts a lightweight design and uses materials with thermal expansion coefficients similar to silicon materials, such as pressureless sintered silicon carbide, silicon infiltrated silicon carbide, silicon nitride, and aluminum nitride. Suction cups have high rigidity, high thermal conductivity, low thermal expansion, high stability, and other characteristics. In addition, they also have high purity and uniform grain size, which can effectively reduce particle and chemical cleaning pollution problems and extend their service life.


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    Features:Application:

    High thermal conductivity, low coefficient of expansion

    - Good flatness

    - High stiffness, superior wear resistance

    - Lightweight design

    - High purity, free from metal ion contamination

    - Customizable structure according to user needs

    - Semiconductor lithography

    - Semiconductor quantity detection





  • Specifications and Parameters

    Parameter

    Index

    平面度/Flatness

    0.2μm

    适用规格/Specifications

    6/8"  12"  8/12"

    表面特征/Surface Feature

    Convex point type, groove type

    Pin高度/Pin Hight

    0.05-0.2mm

    Pin直径(最小)/Pin Minimum Diameter

    ∅0.2mm

    pin间距(最小)/Minimum spacing

    3mm

    密环宽度(最小)/Minimum Seal Width

    0.7mm

    表面粗糙度/Surface Roughness

    Ra 0.02

    厚度公差/Thickness Tolerance

    ±0.01mm

    直径公差/DiameterTolerance

    ±0.01mm

    平行度公差/Parallelism Tolerance

    ≤3μm




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