Planar Two-dimensional Precision Displacement Table

  • 格物光学-平面式二维精密位移台.png



    The PL90 series planar two-dimensional precision displacement table from Goptica adopts the XY integrated and orthogonal design concept, with ultra-thin contour dimensions that can achieve high-precision and high stiffness linear motion in the horizontal X/Y axis with 2 degrees of freedom. It can be widely applied in fields such as semiconductors, flat panel displays, fiber optic alignment, and biomedicine.


    Product manual: 格物PDF.png

    Features:Mechanical dimension diagram:

    High dynamic response, non-contact linear motor drive

    High precision linear optical encoder feedback

    Design of high stiffness anti creep cross roller guide rail

    Excellent positioning accuracy and dynamic performance





    格物光学-平面式二维精密位移台尺寸.png



  • Specifications and Parameters


    PL90-100PL90-200PL90-300
    行程/Travel±50mm±100mm±150mm
    最大速度/Maximum Speed500mm/s750mm/s1000mm/s
    加速度/Maximum Acceleration1g1g1g

    精度/Accuracy

    ±1.5μm±2μm±2.5μm
    双向重复精度/Bidirectional Repeatability±0.5μm
    直线度/Horizontal straightness±1μm±1.5μm±2μm
    平面度/Nertical straightness±1μm±1.5μm±2μm
    俯仰/Pitch12 arcsec15 arcsec18 arcsec
    横滚/Roll12 arcsec15 arcsec18 arcsec
    偏摆/Yaw6 arcsec8 arcsec10 arcsec
    正交性/Orthogonality20 arcsec20 arcsec20 arcsec
    机械特征/Mechanical Specifications
    驱动负载(无负 载)/Moving Mass (without payload)Upper Axis2.9Kg8.6Kg16.3Kg
    Lower Axis8.4Kg16.7Kg45Kg
    最大负载/Max Load Capacity15Kg26Kg30Kg
    平台质量/Stage Mass11Kg25Kg54Kg
    外观尺寸/Dimension250mmx230mmx60mm360mmx340mmx90mm410mmx410mmx90mm
    平台材料/Materialaviation aluminum, black anodized



  • Customized information

    Option for flat two-dimensional precision displacement table: In the PL90 series product series, there are options that can be selected according to the user's actual application. The optional content includes options such as travel, encoder, high-precision calibration, etc.


    Table 1 Size Options
    -100100mm stroke displacement platform, equipped with linear motor and limit
    -200200mm stroke displacement platform, equipped with linear motor and limit
    -300300mm stroke displacement platform, equipped with linear motor and limit



    Table 2 Encoder Options

    -S1

    Incremental analog optical linear encoder, 1Vpp

    -S2

    Incremental digital optical linear encoder, RS422

    -S3

    Absolute optical linear encoder, BISS



0 products in total Add Contrast
Product Picture Product Model Drawings And Specifications Operation

Please contact us for more information

  • Information request

  • Price consultation

  • Product delivery date

  • Product customization

  • Demo application

  • Sample application

  • Technical support

  • Other