PMNL-A02 Series - Micro-step Displacement Table

  • 格物光学14-PMNL-A02系列-微步位移台-1.png



    The PMNL-A02 series of Gewu Optics - Microstep Displacement Platform is a motion platform based on ceramic microstep motors, which achieves linear driving of the motion axis table through the step-by-step driving method of ceramic motors. The micro step motion table has a small volume and a large driving force; It can maintain high holding force, no thermal power consumption, and no magnetic leakage in a stationary state; It has millimeter level large motion range and nanometer level high resolution.。


    Product manual: 格物PDF.png


    Features:Application:

    High driving force

    - Nano precision

    - High static clamping force

    - Large travel range

    - High resolution

    - Suitable for high vacuum environments (<10 ⁵ Pa)

    - Suitable for non-magnetic environments



    Precision adjustment of lithography machine lens

    - Non-magnetic environment

    - Precision electron microscope adjustment

    - Vacuum non heating environment





    Mechanical dimension diagram:





    格物光学14-PMNL-A02系列-微步位移台-2.png

    格物光学14-PMNL-A02系列-微步位移台-3.png




  • Specifications and Parameters


    PMNL-A02-20

    Unit

    Tolerance

    运动轴/Active Axes

    X



    运动和定位/Motion&Positioning

    运动行程/Travel range

    20

    mm


    模拟量模式下行程/

    Travel range in X (analog mode)

    ±2

    μm


    传感器/Sensor




    开环分辨率/Open loop resolution

    1

    nm


    闭环分辨率/Closed loop resolution


    nm


    速度/Velocity

    0.6

    mm/s

    Maximum value

    最大驱动频率/Max.drive frequency

    150

    Hz

    ±20%

    机械特性/Mechanical Properties

    驱动力/Drive force

    20

    N

    Maximum value

    保持力/Holding force

    30

    N

    minimum value

    驱动特性/Drive Properties

    电机类型/Motor type

    Ceramic Microstep Motor



    工作电压/Operating voltage

    -250~+250

    V


    其他/Miscellaneous

    工作温度范围/operating

    temperature range

    0~55


    材料/Material

    Stainless steel, titanium alloy



    重量/Mass


    g

    ±5%

    电缆长度/Cable length

    2

    m

    ±0.05m

    电气接口/Electrical interface

    5ub-D15 male head






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