Hollow Planar Two-dimensional Precision Displacement Table

  • 格物光学-中空式平面二维精密位移台.png




    The PLA90 series hollow two-dimensional precision displacement table of Goptica adopts the XY integrated and orthogonal design concept, with ultra-thin contour size and large hollow through-hole size, which can achieve high-precision and high stiffness linear motion in the horizontal X/Y axis with 2 degrees of freedom. It can be widely used in semiconductors, flat panel displays, fiber optic alignment, biomedicine, etc., especially suitable for double-sided processing or genetic testing fields.

    Product manual: 格物PDF.png



    Features:Mechanical dimension diagram:

    - High dynamic response, non-contact linear motor drive

    - High precision optical linear encoder feedback

    - Design of high stiffness creep resistant intersecting roller guide rail

    - Excellent positioning accuracy and dynamic performance

    - Large hollow size design

    格物光学-中空式平面二维精密位移台尺寸.png



  • Specifications and Parameters


    PLA90-100PLA90-200PLA90-300
    行程/Travel±50mm±100mm±150mm
    最大速度/Maximum Speed1m/s1m/s1m/s
    加速度/Maximum Acceleration1g1g1g
    精度/Accuracy±0.5μm
    双向重复精度/Bidirectional Repeatability±0.25μm
    直线度/Horizontal straightness±2μm±2μm±2μm
    平面度/Nertical straightness±2μm±2μm±2μm
    俯仰/Pitch40 μrad50 urad60 μrad
    横滚/Roll30 μrad40 μrad50 urad
    偏摆/Yaw20 μrad30 μrad40 μrad
    正交性/Orthogonality97 μrad97 μrad97 μrad
    机械特征/Mechanical Specifications
    驱动负载(无载)/Moving Mass (without payload)Upper Axis13.8Kg8.6Kg19.8Kg
    Lower Axis5.8Kg16.8Kg11.2Kg
    最大负载/Max Load Capacity20Kg25Kg45Kg
    平台质量/Stage Mass11Kg21Kg34Kg
    外观尺寸/Dimension380mmx380mmx90mm380mmx380mmx90mm410mmX410mmX90mm
    平台材料/Materialaviation aluminum, black anodized



  • Customized information

    Hollow planar two-dimensional precision displacement table optional: In the PLA90 series product series, optional options are configured that can be selected according to the actual application of the user. The optional content includes options such as travel, encoder, high-precision calibration, etc.


    Table 1 Travel Options
    -100100mm stroke displacement platform, equipped with linear motor and limit
    -200200mm stroke displacement platform, equipped with linear motor and limit
    -300300mm stroke displacement platform, equipped with linear motor and limit



    Table 2 Encoder Options

    -S1

    Incremental analog optical linear encoder, 1Vpp

    -S2incremental digital optical linear encoder, RS422
    -S3

    Absolute optical linear encoder, BISS



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