Polar Coordinates Precision Displacement Table

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The PS150-155 series polar coordinate precision displacement table from Goptica adopts design concepts such as high modularity and ultra-thin design, achieving high-precision, high stiffness linear and rotational motion in the X, Z, and T axes with 3 degrees of freedom. Among them, a unique large stroke maglev gravity compensation technology is adopted vertically to reduce the load on the vertical motor and greatly improve the vertical motion performance and service life. It can be widely used in wafer production control applications, such as thin film measurement, critical dimension inspection, etc.

Product manual：

Features：

Mechanical dimension diagram：

- Highly modular 3-axis platform with orthogonal design

- Global flatness and straightness reach micrometer level

- X-axis

High stiffness linear guide rail

High dynamic response, non-contact linear motor drive

Active air-cooled/water-cooled heat dissipation design

- Z-axis

Vertical magnetic levitation gravity compensation can achieve high positioning accuracy

High rigidity, high-precision guiding design

Ultra thin and lightweight design

Modular design

Vertical maximum support for 30mm mechanical stroke

- T-axis

360 ° rotation without pipeline winding

Supports wafer adsorption of various specifications such as 12 ', 8', and 6 '

Active air-cooled/water-cooled heat dissipation design

Supports maximum ± 0.7mm wafer warpage

Maximum support speed 150rpm

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格物光学-极坐标精密位移台尺寸2.png

Specifications and Parameters

	PS150-155
轴/Axes Name	X	Z	T
行程/Travel	155 mm	25 mm	360°, Infinite
最大速度/Maximum Speed	400 mm/s	40 mm/s	900°/s
加速度/Maximum Acceleration	4 m/s^2	1 m/s^2	6280°/s^2
精度/Accuracy (With Calibration)	±1μm	±0.4 μm	±3 arcsec
双向重复精度/Bidirectional repetition accuracy	±0.5 μm	±0.2 μm/1 mm	±2 arcsec
直线度/Straightness	6 μm	NA	NA
俯仰/Pitch	±20 μrad (4.5 arcsec)	NA	NA
横滚/Roll	±20 μrad (4.5 arcsec)	NA	NA
偏摆/Yaw	±20 μrad (4.5 arcsec)	NA	NA
轴向跳动/Axial Error Motion	NA	NA	±2 μm
径向跳动/Radial Error Motion	NA	NA	±2 μm
机械特征/Mechanical Specifications
驱动负载（无负载）/Moving Mass (without payload)	12 Kg	5.4 Kg	NA
转动惯量/Inertia (No load)	0.00401 Kg*m^2
最大负载/Max Load Capacity	2 Kg（customizable）
平台质量/Stage Mass	44 Kg
外观尺寸/Dimension	460mmX362mmX156.4mm（vertical mechanical lower limit）
平台材料/Material	aviation aluminum alloy, anodized

Customized information
Polar coordinate precision displacement table optional: In the PS150-155 product series, optional options are configured that can be selected according to the user's actual application.
Table 1 Encoder Options
-S1
Incremental analog optical linear encoder，1Vpp,20μmPitch
-S2 incremental digital optical linear encoder，TTL,20umPitch
-S3 Absolute Optical Linear Encoder, BISS-C, 20umPitch

Table 2 Vertical Travel Options
-10
Vertical mechanical stroke 10mm
-20 vertical mechanical stroke 20mm
-25 vertical mechanical stroke 25mm

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Polar Coordinates Precision Displacement Table

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Table 1 Encoder Options
-S1	Incremental analog optical linear encoder，1Vpp,20μmPitch
-S2	incremental digital optical linear encoder，TTL,20umPitch
-S3	Absolute Optical Linear Encoder, BISS-C, 20umPitch

Table 2 Vertical Travel Options
-10	Vertical mechanical stroke 10mm
-20	vertical mechanical stroke 20mm
-25	vertical mechanical stroke 25mm