Multi-axis Precision Alignment Platform
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Goptica Z3T110-24 Series - Multi axis Precision Alignment Platform has 4 degrees of freedom, providing a rotation angle of 364 °, dual Z-axis, one for coarse adjustment of wafer loading and unloading, one for precision adjustment of focusing, and tip and tilt correction above ± 0.2 °. The Z3T110-24 module provides better tracking error control performance for motion, and its repeatability, motion, and stability time performance all support larger stroke motion. The Z3T110-24 module is mainly used for front-end applications, with priority given to photolithography back-end and wafer production control.
Product manual：  |
| Features： | Mechanical dimension diagram： |
- High precision 364 ° rotational motion - Precise adjustment of tips and tiles above ± 0.2 ° - Dual Z-axis design: Coarse Z-axis for wafer transfer and Fine Z-axis for precision focusing - Unique Maglev Gravity Compensation Technology - Very small axial and radial runout, only ± 1.25 μ m
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Specifications and Parameters
| Z3T110-24 |
轴/Axes Name | Fine Z | Tip-Tilt | Coarse Z | T |
行程/Travel | ±2 mm | ±0.2° | ±5 mm | 364° |
最大速度/Maximum Speed | 0.1 m/s |
| 0.1 m/s | 10 rad/s |
加速度/Maximum Acceleration | 1 m/s^2 |
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| 55 rad/s^2 |
定位精度/Position accuracy full stroke | 校准前indicative value |
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| ±10 μm | ±10 arcsec |
校准后calibration | ±0.02 μm |
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| ±0.75 arcsec |
双向重复精度/Bidirectional repetition accuracy | ±0.01 μm |
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| ±0.35 arcsec |
到位稳定性/Typical position stability (3σ) | ±15 nm | ±0.04 arcsec |
| ±0.0038 arcsec |
径向跳动/Radial runout |
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| ±1.25 μm |
轴向跳动/Axial runout |
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| ±1.25 μm |
偏摆/Yaw | ±0.5 arcsec |
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机械特征/Mechanical Specifications |
驱动负载（无负载）/Moving Mass (without payload) | 6.2 Kg | 0.5 Kg | 3.2 Kg |
最大负载/Max Load Capacity | 2.5 Kg（customizable） |
平台质量/Stage Mass | 15 Kg |
外观尺寸/Dimension | S259.5mmX115.5mm（Vertically in the middle position of the travel） |
Customized information
Hollow planar two-dimensional precision displacement table optional: In the PLA90 series product series, optional options are configured that can be selected according to the actual application of the user. The optional content includes options such as travel, encoder, high-precision calibration, etc.
| Table 1 Encoder Options |
| -S1 | incremental analog optical linear encoder，1Vpp |
| -S2 | incremental digital optical linear encoder，RS422 |
| -S3 | Absolute Optical Linear Encoder，BISS |
Table 2 Travel Options |
| -10 | Coarse Z effective travel 10mm |
| -20 | Coarse Z effective travel 15mm |
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Product Picture |
Product Model |
Drawings And Specifications |
Operation |