High Vacuum Electrostatic Sucker


  • 格物光学1-高真空静电吸盘-1.png

    Product manual: 格物PDF.png


    Features: Application:

    - Coulomb type electrostatic suction cup

    - Support dual electrode and multi electrode design

    - Suitable for ultra-high vacuum environments of 10-5Pa and below

    - High electrostatic adsorption force, residual adsorption force>60% after 24 hours

    - High global surface accuracy of adsorption surface

    - The surface pattern of the adsorption surface can be customized

    - Suitable for non-magnetic environments


    Electron beam lithography/E-Beam lithography and EUV lithography/E-Beam lithography

    - 量测/Metrology

    - 平板显示领域/Display manufacturing

    - 电子束晶圆缺陷检测/E-Beam and defect review

    - 键合/Wafer bonding





    Host computer DEMO:


    格物光学1-高真空静电吸盘-2.png
    General external dimensions, unit: mm




  • Specifications and Parameters

    Product model  

    6inch ESC

    8inch ESC

    12inch ESC

    Unit

    Tolerance

    原理类型/Theory Type

    Coulomb-type 

    Coulomb-type 

    Coulomb-type 



    电极数量/Number of

    Electrodes

    Dual electrode

    Dual electrode

    Dual electrode



    精度/Precision

    全局平面度/Peakto valley

    <1

    <1

    <2

    μm


    平行度/Parallelism

    <5

    <5

    <5

    μm


    电气参数/Leakage current

    标准吸附电压/Standard

    Adsorption Voltage

    1000

    1000

    1000

    V


    漏电流/Leakage Current

    <5

    <5

    <5

    nA


    性能参数/Performance Parameter

    吸附力/Adsorption Force

    ≥10

    ≥20

    ≥40

    N


    24h残余吸附力/Residual

    Adsorption Force

    ≥6

    ≥12

    ≥24

    N


    外形尺寸/Size

    直径D/Diameter

    144

    194

    294

    mm


    厚度H/Thickness

    12.6

    12.6

    12.6

    mm






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