- Provide two-phase voltages of equal magnitude and opposite phase

- Provide puncture voltage to puncture the wafer

- Provide capacitance detection to indicate the status of no wafer, wafer adsorption, and release

- Provide puncture detection to indicate whether the puncture was successful

- LCD display, capable of displaying adsorption and puncture voltages, as well as resistance and capacitance detection values

输入/Input

100~264VAC/47~63Hz

The switch is located on the rear panel and has a fuse

通讯方式/Communication

Using custom commands to communicate with the upper computer via RS485

吸附电压/Clamp Voltage

Full range 550V, accuracy 5%

Dual channel output with opposite polarity

穿刺电压/Penetrate Voltage

1000~4000V output, accuracy 5%

环境/Environment

Operating temperature: 0 ℃ to 45 ℃; Storage temperature：-35℃至85℃

尺寸/Dimensions

482.6mm×88.1mm×340mm(length × width × depth)

Controller identification definition

Front panel of controller

前面板标识/Front Panelldentify

标识定义/ldentify Definition

备注/Remark

PENETRATE

Puncture action indicator light

GROUNDER

Puncture success indicator light

ATTACH

Adsorption action indicator light

RELEASE

Release the action indicator light

COM

The program modification burning indicator light is normally off during actual use

HOLD

Wafer placement indicator light, lights up when the wafer is placed in the suction cup

POWER

Controller power indicator light

RUNNING

Controller operation indicator light

Rear panel of controller

Rear panel of controller

后面板标识/Rear Panel ldentification

标识定义/Identify Definition

备注/Remark

CHUCK+/-

Adsorption and release of high-pressure interface

PENTRATE

Puncture high voltage interface

PEN_DETECTION

Resistance detection interface

EARTH

Electrostatic suction cup grounding interface

RS485

As a DB9 connector, it can achieve 485 communication with the upper computer

ETHERNET

Network communication interface

X1、X2、X3

Function reserved interface, can be customized for customer functions